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Vacuum coating used in vacuum pump system and maintenance matters? _

by:J&T     2020-05-25

vacuum coating technology is an important branch of vacuum pump application technology, it has been widely used in optics, electronics, energy development, physical and chemical equipment, construction machinery, packaging, civilian products, appearance in the category of science and scientific research, etc. Vacuum coating method is mainly adopted by the evaporation plating, sputtering, ion plating, beam accumulation and molecular beam epitaxy plating, etc. If the purpose of the vacuum coating is to change the physical appearance of the physical and chemical properties, the technology is undoubtedly an important local vacuum disposal technology of appearance. In terms of components, in a vacuum evaporation nickel chrome, able to make resistance, capacitor, selenium evaporation can get the electrostatic copier drum, evaporation barium titanate can manufacture magnetostrictive acoustic components, and so on. Vacuum evaporation can also be used in the manufacture of superconducting film and inertial confinement upheaval echo with beads coated. Also able to jewelry, watches and clocks, textiles, metal shell looks decorative pattern, gold silver line such as vapor deposition decorative film, and the sputtering or ion plating of cutting tool, mould manufacturing superhard membrane. In two years by the rise of tial preparation of titanium products, such as stainless steel sheet, mirror plate, present bracket, stair railing, handrail, high-grade bed etc are currently in vogue.

uninterrupted use of more than twelve months for vacuum coating equipment, the inside of the pumping speed will slow down, it shall timely to do cleaning work, so how to all aspects of the vacuum coating equipment maintenance?

the first filling the air, down connection pipes, discharge furnace plate and nozzle, pump cavity and water pump gallbladder points three times cleaning, use gasoline to clean again, first with detergent to clean it again, then clean with clear water thoroughly clean.

wait for dry after, rejoin the pump oil, packed pump, and put back into the body, can restart. Before restarting, attention should be paid to leak detection work. Start the maintain pump, close the door, after a few minutes, observe whether diffusion pump part of the vacuum degree is 6 x10 palmer, otherwise for leak detection. Check whether the connection place o-ring seal, or crush seal ring. Eliminate leakage hidden trouble is heating, or diffusion water pump oil will burn ring, unable to enter the working state.

each completed more than two hundred coating process for vacuum coating equipment, should clean workshop, swab repeatedly with caustic soda saturated solution coating equipment manufacturers shows that vacuum chamber wall, pay attention to safety can not direct contact with caustic soda solution, in order to avoid burns, the purpose is to make up the membrane material plating aluminum react with caustic soda, membrane layer falls off after reaction, and release hydrogen, reoccupy clear water clean vacuum chamber and a cloth stained with gasoline cleaning the dirt in the valve.

the inside of the vacuum coating equipment coarse pump work should change new oil thirty days in a row, vacuum coating machine oil pump used for a long time, may be pumped in moisture, impurities and other reasons, the use of oil viscosity, vacuum, so need to replace the pump oil, the old oil within the pump all released. Screw bolt playback oil, add the impurities vacuum oil to quantitative. !


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